Available to measure
plane shapes easily.
Site-oriented ease of use
The use of an alignment aid makes measurement easier for first-time users.In addition, the automatic adjustment of the light intensity eliminates
the need to replace the reference plate even for workpieces with significantly different reflectance.Furthermore, the analysis can be started using a non-contact sensor without touching the
mouse.
No concern about vibration caused by operations.
Please give us 35 seconds! This is a simple operation video!
Reduction of backside reflection
In a laser interferometer, in the measurement of parallel plane samples,measurement is difficult due to the influence of the back surface reflection
wavefront on the front surface in some cases.On the other hand, in the low coherence interference principle, by limiting the coherence in a short region,Interference from the back surface can be
suppressed, and interference fringes from only the surface are generated.
Measurement results example
Measurement results of flatness
Measurement result of surface roughness
Main Specifications
●Analyzer and vibration isolation table are equipped as standard.
●Tool for measuring transmitted wavefront (option)
●Light source wavelength: 633.08nm
●Measurement accuracy: 1/20λ
●RMS accuracy (Short-term):0.1nm)
●RMS repeatability (Short-term):0.03nm)
●RMS accuracy (LONG-term):0.2nm)
●RMS repeatability (LONG-term):0.1nm)
●Resolution 1200x1200 Pixels(1x), 1920x1200 Pixels(4x)
●Measurement duration: < 1sec (single measurement)
